| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a power supply for plasma discharge that can, even if there occurs an arc discharge, recover to stable glow-discharging. <P>SOLUTION: The voltage is turned to a pulse voltage by a first switching element before power is supplied to the body of a plasma discharge device from a DC power supply via an inductor. A potential holding circuit in which a resistor, a capacitor and a second switching element are serially connected is operated while the first switching element is OFF, to thereby restrict arc discharge current at arc discharging. <P>COPYRIGHT: (C)2012,JPO&INPIT |
