| 摘要 |
<p>A transparent conductive film, useful in producing a highly efficient silicon-based thin film solar cell, superior in hydrogen reduction resistance and superior in optical confinement effect; a transparent conductive film laminated body using the same; a production method therefor; and a silicon-based thin film solar cell using this transparent conductive film or the transparent conductive film laminated body, as an electrode. It is provided by a transparent conductive film or the like, characterized by containing zinc oxide as a major component and at least one or more kinds of added metal elements selected from aluminum and gallium, whose content being within a range shown by the following expression (1), and having a surface roughness (Ra) of equal to or larger than 35.0 nm, and a surface resistance of equal to or lower than 65©/–¡ - Al + 0.30 ‰¤ Ga ‰¤ - 2.68 × Al + 1.74
(wherein [Al] represents aluminum content expressed as atomicity ratio (%) of Al/(Zn+Al); while [Ga] represents gallium content expressed as atomicity ratio (%) of Ga/(Zn+Ga)).</p> |
