| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a nitride semiconductor element divided so that the resonator end face becomes flat. <P>SOLUTION: When an LD structure 251 is fabricated on a GaNl-based substrate 250, a cleavage introduction groove 252 is provided by scribing the surface of the LD structure 251 with a diamond blade. The cleavage introduction groove 252 is provided between stripe-like optical waveguides 253 provided in parallel with the<1-100>direction of a wafer, and provided in the shape of dashed lines in the<11-20>direction of a wafer. <P>COPYRIGHT: (C)2013,JPO&INPIT |
