| 摘要 |
A process head for processing a substrate S using a laser beam, comprising: an optical unit 1 including at least one optical element for directing the laser beam; a plurality of Bernoulli air bearings 2 arranged to surround an optical axis A of the optical element and configured to eject a first fluid flow for producing an attractive force between said Bernoulli air bearing 2 and said substrate S by the Bernoulli principle, so as to maintain a substantially constant spacing between said optical element and said substrate. The Bernoulli bearings 2 may each comprise a flat surface with a substantially central orifice for the ejection of the first fluid flow and the direction of ejection may be perpendicular to the flat surface. The process head may include a process area surrounding the optical axis with an environment controlling unit to provide a second fluid flow through the process area for controlling the process environment. Also included are claims for a process apparatus including the process head and a method for supporting a substrate using the process head. |
