| 摘要 |
PROBLEM TO BE SOLVED: To provide a two-dimensional positioning device for making it easy to obtain the two-dimensional long stroke of XY while making it possible to perform rotational positioning, and for making it unnecessary to largely scale a two-dimensional positioning table. SOLUTION: A two-dimensional positioning device includes: a pair of direct-acting mechanisms 3A and 3B which have a moving member 3b configured to be guided and moved by a guidance member 3a, and a driving mechanism 3e configured to drive the moving member 3b, and which are arranged in parallel with a predetermined interval; and a crossing direct-acting mechanism 4 which has a moving member 4c configured to be guided and moved by a guidance member 4b supported by the moving member 3b of the pair of direct-acting mechanisms and arranged in a direction crossing the guidance member 3a, and a driving mechanism 4f configured to drive the moving member 4c, and which is arranged between the pair of direct-acting mechanisms. One end of the crossing direct-acting mechanism 4 is supported so as to be rotated by a fixed support member 5 arranged at the moving member of one of the direct-acting mechanisms, and the other end is supported so as to be rotated by a movable support member 6 arranged between itself and the moving member of the other direct-acting mechanism so as to be movable to a direction crossing the first guidance member. COPYRIGHT: (C)2012,JPO&INPIT |
