| 摘要 |
PROBLEM TO BE SOLVED: To provide a device and method for easily discriminating and determining film thickness unevenness in a conveyance direction of a slit die at coating with coating film from a conveyance pseudo unevenness generated during measurement conveyance of the film thickness unevenness inspection device in a manufacturing step of a color filter to be used for a color filter for liquid crystal or for a display of organic EL or the like. SOLUTION: The device and method are used for inspecting defects in the coating film formed on a transparent substrate 8. The transparent substrate 8 is photographed while a photographing sensor camera 9 and a transmission illumination light source 10 are slid in the direction perpendicular to the conveyance direction of the transparent substrate 8. The obtained image data are subject to image correction process by rectangle processing so as to easily discriminate a pseudo conveyance unevenness generated in the conveyance direction of the transparent substrate 8. Thus the device and method have an advantage of accurate inspection of the film thickness unevenness and density unevenness. COPYRIGHT: (C)2012,JPO&INPIT |
