| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To simplify a series of maintenance operations of a plurality of inductively-coupled electrodes 53 including the operations of mounting and dismounting the electrodes 53. <P>SOLUTION: The CVD plasma system comprises: a vacuum chamber 3; a movable guide rail 29 provided on an inner wall surface of a ceiling wall 15 of the vacuum chamber 3 movably in up and down directions; a plurality of split holders 41S supported on the movable guide rail 29 movably in left and right directions; and an inductively-coupled electrode 53 extending through a pair of first and second holding holes 45 and 47 in each split holder 41S and held as it is. When moving upward the movable guide rail 29 to a reference rail height position with the plurality of split holders 41S set on the movable guide rail 29, each first antenna-side connector 57 is connected with a first ceiling-side connector 17, and each second antenna-side connector 61 is connected with a second ceiling-side connector 19. <P>COPYRIGHT: (C)2012,JPO&INPIT</p> |
