发明名称 アークソースのための点火装置
摘要 The present invention relates to an ignition device for igniting a high-current discharge of an electrical arc evaporator in a vacuum coating system. Ignition is performed by means of mechanically closing and opening a contact between the cathode and the anode. Contact is established by means of an ignition finger that can move on a forced path. On account of the forced path, the ignition finger can be moved by means of a simple mechanical drive to a park position, which is protected against coating, and said ignition finger can also be used to ignite a second target.
申请公布号 JP5624551(B2) 申请公布日期 2014.11.12
申请号 JP20110535892 申请日期 2009.10.08
申请人 エリコン・トレーディング・アクチェンゲゼルシャフト,トリュープバッハOerlikon Trading AG,Truebbach 发明人 クラスニッツァー,ジークフリート;グストエール,オリバー;ハークマン,イェルク
分类号 C23C14/32;C23C14/24;H05H1/48 主分类号 C23C14/32
代理机构 代理人
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