发明名称 SYSTEM AND METHOD FOR A PUMP WITH REDUCED FORM FACTOR
摘要 A multi-stage pump comprises a feed pump (150) having a feed chamber (155) and a dispense pump (180) having a dispense chamber (185). A dispense block (205), which is formed of a single piece of material, defines: at least a portion of the feed chamber (155); at least a portion of the dispense chamber (185); a pump inlet flow path (280); a feed stage outlet flow path (285); a dispense stage inlet flow path (290); a vent flow path; a purge flow path (300, 305); at least a portion of a pump outlet flow path (295); and a portion of each valve of a set of valves (125, 130, 135, 140, 145) to selectively allow fluid flow through the multi-stage pump. A manufacturing method of said multi-stage pump is also disclosed.
申请公布号 EP1952022(B1) 申请公布日期 2014.11.12
申请号 EP20060838070 申请日期 2006.11.20
申请人 ENTEGRIS, INC. 发明人 CEDRONE, JAMES;GONNELLA, GEORGE;GASHGAEE, IRAJ
分类号 F04B43/02;F04B13/00;F04B17/03;F04B23/06;F04B25/00;F04B43/04;F04B49/06 主分类号 F04B43/02
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