发明名称 PROCESS AND MATERIALS FOR MAKING CONTAINED LAYERS AND DEVICES MADE WITH SAME
摘要 There is provided a process for forming a contained second layer over a first layer, including the steps: forming the first layer having a first surface energy; treating the first layer with a priming material to form a priming layer; exposing the priming layer patternwise with radiation resulting in exposed areas and unexposed areas; developing the priming layer to effectively remove the priming layer from the unexposed areas resulting in a first layer having a pattern of developed priming layer, wherein the pattern of developed priming layer has a second surface energy that is higher than the first surface energy; and forming the second layer by liquid depositions on the pattern of developed priming layer on the first layer. The priming material has at least one unit of Formula I In Formula I: R1 through R6 are D, alkyl, aryl, or silyl, where adjacent R groups can join together to form an aromatic ring; X is a single bond, H, D, or a leaving group; Y is H, D, alkyl, aryl, silyl, or vinyl; a-f are an integer from 0-4; m, p and q are an integer of 0 or greater.
申请公布号 EP2673818(A4) 申请公布日期 2014.11.12
申请号 EP20120744890 申请日期 2012.02.10
申请人 E.I. DU PONT DE NEMOURS AND COMPANY 发明人 PARK, KYUNG-HO;RADU, NORA, SABINA;DOBBS, KERWIN, D.;FENNIMORE, ADAM
分类号 H01L51/50;C07C211/54;G03F7/038;G03F7/075;H01L51/00;H01L51/56 主分类号 H01L51/50
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