| 摘要 |
<p>According to the present invention, a heater device for a rapid heat treatment device is a heater device for a heat treatment device for the heat treatment of a substrate. The device includes: a window member including multiple divided penetration windows in which components of the heater device are installed, multiple lamp members installed in the window member to include a reflector for emitting radiant heat to the substrate, and a cooling member for cooling heat from the lamp by being included in an upper part of the lamp member. Features of the device are that a penetration window is installed in a part facing the individual lamp member of the window member but the lamp member including the reflector is directly installed in the window member in which the facing window is installed. According to the present invention, as the lamp member including the independent reflector is directly installed in a thin and divided individual window, the rapid heat treatment device is able to rapidly increase temperature by minimizing a distance between the substrate and the heater member. Moreover, as the window is formed in a more minimized thickness, heat budget is minimized so that the temperature control and temperature equality of the substrate are improved. Meanwhile, as the replacement and maintenance of the independent reflector are easy and damage to the window is prevented, productivity and yield are improved.</p> |
