Fabrication methods of thermoelectric thin film modules using moulds consisting of via-holes and thermoelectric thin film modules produced using the same method

摘要

The present invention relates to a thermoelectric thin film module. In particular, the present invention provides a method for manufacturing a thermoelectric thin film module and the thermoelectric thin film module manufactured by the same. According to the method, the thermoelectric thin film module is manufactured by forming n-type thermoelectric thin film legs and p-type thermoelectric thin film legs with a mold having via-holes so as to simplify a manufacturing method and to enhance properties and reliability of the module.