| 摘要 |
<p>The present invention relates to a sample stage having an electrode structure capable of preventing damage to peripheral structures in the application of high voltage by obtaining the dielectric strength of the peripheral structures while supplying power to a sample through the stable electric contact even in the rotation of the sample stage. The sample stage having an electrode structure according to the present invention comprises: a fixed supporter; a rotation stage arranged on the fixed supporter to be rotated; a sample holder arranged on the rotation stage, and rotated when the rotation stage rotates; a conductive pad arranged in one side of the sample holder; and an electrode structure fixed on the fixed supporter, and electrically coming in contact with the conductive pad of the sample holder by the restoring force of a spring.</p> |
