发明名称 検査装置及び検査方法
摘要 <p>An inspection apparatus for inspecting a subject (sample) (for example, performing identification or imaging of the subject) using an expansion coefficient with a relatively small amount of data. The inspection apparatus includes a transforming unit that performs a wavelet transform on a terahertz time waveform obtained using a terahertz wave detected by a detecting unit. In addition, the inspection apparatus includes a selecting unit that selects, from a first expansion coefficient in the wavelet transform, a second expansion coefficient stored in advance and included in the first expansion coefficient. Furthermore, the inspection apparatus includes a comparing unit for comparing a first value of the second expansion coefficient with a second value of the second expansion coefficient selected by the selecting unit.</p>
申请公布号 JP5623061(B2) 申请公布日期 2014.11.12
申请号 JP20090260108 申请日期 2009.11.13
申请人 发明人
分类号 G01N21/35;G01N21/3586;G01N21/27 主分类号 G01N21/35
代理机构 代理人
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