Multi-Dimensional sensors and sensing systems

摘要

A universal microelectromechanical (MEMS) nano-sensor platform having a substrate and conductive layer deposited in a pattern on the surface to make several devices at the same time, a patterned insulation layer, wherein the insulation layer is configured to expose one or more portions of the conductive layer, and one or more functionalization layers deposited on the exposed portions of the conductive layer to make multiple sensing capability on a single MEMS fabricated device. The functionalization layers are adapted to provide one or more transducer sensor classes selected from the group consisting of: radiant, electrochemical, electronic, mechanical, magnetic, and thermal sensors for chemical and physical variables and producing more than one type of sensor for one or more significant parameters that need to be monitored.

主权项

1. A monitoring device, comprising:
a. at least one sensor or sensing system utilizing microelectromechanical systems (MEMS) technology that consumes less than 500 μW of power; b. a processor; c. non-transitory computer readable medium tangibly embodying a set of executable instructions; and d. a power source;wherein the set of executable instructions is configured to cause the processor to:
cause the power source to raise the power it consumes or operating temperature over a plurality of predetermined operating conditions over a prescribed time; receive corresponding electrical changes in a sensing element of the sensor over each of the plurality of predetermined operating conditions over time; and calculate target gas analyte composition for the received corresponding electrical changes.