发明名称 Method for decomposing lines of an electronic circuit
摘要 A method for defining parallel lines extending along a first direction in a same level of an integrated circuit, among which at least first and second lines separated by an even number of lines are interconnected, a space having a width at least equal to the minimum space between two lines separated by one line being left free, in a second direction perpendicular to the first direction, on either side of a minimum rectangle containing the first and the second lines.
申请公布号 US8883625(B2) 申请公布日期 2014.11.11
申请号 US201213425759 申请日期 2012.03.21
申请人 STMicroelectronics (Crolles 2) SAS 发明人 Farys Vincent;Serret Emmanuelle
分类号 H01L21/82;H01L21/44;H01L23/528;H01L27/02;G06F17/50;H01L21/033 主分类号 H01L21/82
代理机构 Allen, Dyer, Doppelt, Milbrath & Gilchrist, P.A. 代理人 Allen, Dyer, Doppelt, Milbrath & Gilchrist, P.A.
主权项 1. A method for defining a plurality of parallel lines extending in a first direction in a same level of an integrated circuit at regular intervals, comprising: forming a first parallel line portion; forming a second parallel line portion at an uneven number of intervals from the first parallel line portion, wherein: the first parallel line portion and the second parallel line portion are interconnected in the same level; anda rectangular surface area defined by the first parallel line portion and the second parallel line portion is separated from any other line of the plurality of lines by at least two intervals.
地址 Crolles FR