Reticle with composite polarizer and method of simultaneous optimization of imaging of a set of different patterns

摘要

A reticle with a composite polarizer includes: a transparent substrate; a patterned layer disposed on said transparent substrate; and a polarizing filter disposed on said transparent substrate, wherein said transparent substrate is substantially transparent with respect to illumination light, said patterned layer is partially opaque with respect to said illumination light, and said polarizing filter is capable of selectively polarizing said illumination light.

主权项

1. A reticle with a composite polarizer, comprising:
a transparent substrate; a patterned layer disposed on one side of said transparent substrate, and outside of said transparent substrate; and a polarizing filter disposed on the same side of said transparent substrate and in direct contact with said patterned layer, wherein said transparent substrate is substantially transparent with respect to a illumination light, said patterned layer is at least substantially partially opaque with respect to said illumination light, only one of said polarizing filter and said patterned layer is in direct contact with said transparent substrate, and said polarizing filter is capable of selectively polarizing said illumination light and the position of said polarizing filter is one of immediately below and immediately above said patterned layer so that light passes through said transparent substrate before passes through said patterned layer.