Mask pattern and correcting method thereof

摘要

A mask pattern and a correcting method thereof are provided. The correcting method includes the following steps. An original pattern having a first original contour and a second original contour is provided. The first original contour has a first original corner. The second original contour has a second original corner, which is near the first original corner. The first and second original corners are cut to form a cut pattern. An optical proximity correction (OPC) process is applied to the cut pattern to form the mask pattern.

主权项

1. A correcting method of a mask pattern, comprising:
providing an original pattern having a first original contour and a second original contour, the first original contour having a first original corner and the second original contour having a second original corner, which is near the first original corner; cutting the first and second original corners to form a cut pattern; and applying an optical proximity correction (OPC) process to the cut pattern to form the mask pattern; wherein the first original contour further has a third original corner, the original pattern further has a third original contour, the first original contour is located between the second original contour and the third original contour, the third original contour has a fourth original corner, the third original corner is near the fourth original corner, and in the step of forming the cut pattern, the third original corner and the fourth original corner are cut, and two cutting directions of the first and the third original corners are substantially perpendicular to each other.