Inkjet head and method of manufacturing the same

摘要

An inkjet head includes a substrate, a piezoelectric member provided on the substrate and having predetermined length, plural pressure chamber grooves provided on the piezoelectric member in a longitudinal direction, opposed walls forming the pressure chamber grooves being configured to function as driving elements that eject ink, a chamber groove provided along the longitudinal direction of the piezoelectric member, the chamber groove being formed on the substrate continuously to a slope of the piezoelectric member, an insulating member provided in the chamber groove, a wire through which a signal for driving the walls of the pressure chamber grooves passes, the wire being formed on the substrate and the insulating member, a cover member opposed to the substrate and configured to cover the piezoelectric member and the chamber groove, and plural nozzles configured to pierce through the cover member, respectively communicate with the pressure chamber grooves, and discharge the ink.

主权项

1. An inkjet head comprising:
a substrate; a piezoelectric member provided on the substrate and having predetermined length; a plurality of pressure chamber grooves provided on the piezoelectric member at equal intervals in a longitudinal direction, opposed walls forming the pressure chamber grooves being configured to function as driving elements that eject ink; a chamber groove provided along the longitudinal direction of the piezoelectric member, the chamber groove being formed on the substrate continuously to a slope of the piezoelectric member; an insulating member provided in the chamber groove, the insulating member extending from the chamber groove onto the slope of the piezoelectric member, wherein the insulating member is an insulating resin film; a wire through which a signal for driving the walls of the pressure chamber grooves passes, the wire being formed on the substrate and the insulating member; a cover member opposed to the substrate and configured to cover the piezoelectric member and the chamber groove; and a plurality of nozzles configured to pierce through the cover member, respectively communicate with the pressure chamber grooves, and discharge the ink.