发明名称 CATHODE HAVING ELECTRON PRODUTION AND FOCUSING GROOVES, ION SOURCE AND RELATED METHOD
摘要 <p>A cathode having electron production and focusing grooves for an ion source of an ion implanter system, the ion source and a related method are disclosed. In one embodiment, the cathode includes a working surface having a plurality of electron production and focusing grooves positioned therein. A repeller of the ion source may be similarly structured.</p>
申请公布号 KR101460053(B1) 申请公布日期 2014.11.11
申请号 KR20107000056 申请日期 2008.06.09
申请人 发明人
分类号 H01L21/265 主分类号 H01L21/265
代理机构 代理人
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