Test apparatus, test method, and device interface for testing a device under test using optical signaling

摘要

Provided is a test apparatus that tests a device under test including an optical coupler transmitting optical signals in a direction perpendicular to a device surface. The test apparatus includes a substrate on which the device under test is to be loaded, an optical transmission path that transmits the optical signals, and a lens section facing the optical coupler on the substrate that focuses the optical signals from an end of either the optical coupler or the optical transmission path to an end of the other.

主权项

1. A test apparatus for testing a device under test by transmitting a test optical signal to the device under test and receiving, in response, a device optical signal from the device under test, the device under test including an optical coupler for receiving the test optical signal from the test apparatus and for transmitting the device optical signal to the test apparatus, the test apparatus comprising;
a substrate on which the device under test is to be loaded; a lens provided on the substrate that faces the optical couple and focuses the device optical signal from the optical coupler; and an optical transmission path that transmits the test optical signal to the device under test and transmits the device optical signal received from the lens, wherein the device optical signal results from processing of the test optical signal by the device under test.