| 发明名称 | Impedance matching apparatus | ||
| 摘要 | Provided is an impedance matching apparatus for matching impedance to a plasma load. The impedance matching apparatus includes a first frequency impedance matching circuit unit that transfers an output of a first frequency RF power source unit, operating at a first frequency, to the plasma load; and a second frequency impedance matching circuit unit that transfers an output of a second frequency RF power source unit, operating at a second frequency higher than the first frequency, to the plasma load. The first frequency impedance matching circuit unit includes a T-type matching circuit, and the second frequency impedance matching circuit unit includes a standard L-type matching circuit or Π-type matching circuit. | ||
| 申请公布号 | US8884520(B2) | 申请公布日期 | 2014.11.11 |
| 申请号 | US201213571167 | 申请日期 | 2012.08.09 |
| 申请人 | Plasmart Inc. | 发明人 | Kim Jae Hyun;Lee Sang Won;Lee Yong Gwan |
| 分类号 | H01J19/78;H05H1/46;H03H7/40;H01J37/32 | 主分类号 | H01J19/78 |
| 代理机构 | Jenkins, Wilson, Taylor & Hunt, P.A. | 代理人 | Jenkins, Wilson, Taylor & Hunt, P.A. |
| 主权项 | 1. An impedance matching apparatus for matching impedance to a plasma load, comprising: a first frequency impedance matching circuit unit configured to transfer an output of a first frequency RF power source unit, operating at a first frequency, to the plasma load; and a second frequency impedance matching circuit unit configured to transfer an output of a second frequency RF power source unit, operating at a second frequency higher than the first frequency, to the plasma load, wherein the first frequency impedance matching circuit unit includes a T-type matching circuit, and the second frequency impedance matching circuit unit includes a standard L-type matching circuit or a Π-type matching circuit, and wherein the first frequency impedance matching circuit unit further includes a first frequency output filter unit disposed between the T-type matching circuit and the plasma load. | ||
| 地址 | Daejeon KR | ||