| 发明名称 | Piezoelectric element | ||
| 摘要 | A piezoelectric element includes a substrate, a lower electrode layer, a piezoelectric layer, and an upper electrode layer. The lower electrode layer is fixed to the substrate and the piezoelectric layer is formed on the lower electrode layer. The upper electrode layer is formed on piezoelectric layer. The lower electrode layer contains pores therein and has a larger thermal expansion coefficient than the piezoelectric layer. | ||
| 申请公布号 | US8884499(B2) | 申请公布日期 | 2014.11.11 |
| 申请号 | US201214125520 | 申请日期 | 2012.08.06 |
| 申请人 | Panasonic Corporation | 发明人 | Noda Toshinari;Kubo Takashi;Suzuki Hisao;Wakiya Naoki;Sakamoto Naonori |
| 分类号 | H01L41/047;H01L41/08;H01L41/187 | 主分类号 | H01L41/047 |
| 代理机构 | McDermott Will & Emery LLP | 代理人 | McDermott Will & Emery LLP |
| 主权项 | 1. A piezoelectric element comprising: a substrate; a lower electrode layer fixed to the substrate; a piezoelectric layer formed on the lower electrode layer; and an upper electrode layer formed on the piezoelectric layer, wherein the lower electrode layer includes a conductive oxide layer containing pores therein, and has a larger thermal expansion coefficient than the piezoelectric layer. | ||
| 地址 | Osaka JP | ||