High electron mobility transistor structure with improved breakdown voltage performance

摘要

A high electron mobility transistor (HEMT) includes a silicon substrate, an unintentionally doped gallium nitride (UID GaN) layer over the silicon substrate. The HEMT further includes a donor-supply layer over the UID GaN layer, a gate structure, a drain, and a source over the donor-supply layer. The HEMT further includes a dielectric layer having one or more dielectric plug portions in the donor-supply layer and top portions between the gate structure and the drain over the donor-supply layer. A method for making the HEMT is also provided.

主权项

1. A high electron mobility transistor (HEMT) comprising:
a silicon substrate; an unintentionally doped gallium nitride (UID GaN) layer over the substrate; a donor-supply layer over the UID GaN layer; a gate structure, a drain, and a source over the donor-supply layer, said gate structure disposed between the drain and the source; and a dielectric layer over the donor-supply layer between the gate structure and the drain, the dielectric layer having one or more first portions in the donor-supply layer and a second portion over the one or more first portions and the donor-supply layer, wherein at least one of the one or more first portions is proximate to the gate, and a thickness of a portion of the donor-supply layer under the one or more first portions of the dielectric layer is at least 40% of a thickness of a portion of the donor-supply layer directly under the second portion of the dielectric layer.