| 发明名称 | Method of fabricating an inertial sensor | ||
| 摘要 | Inertial sensor having a body with first and second cavities on opposite sides thereof, a sensing element in the first cavity, electronic circuitry in the second cavity, electrical conductors interconnecting the sensing element and the circuitry, and leads connected electrically to the circuitry and extending from the body for mounting the sensor and making connections with the circuitry. | ||
| 申请公布号 | US8881370(B2) | 申请公布日期 | 2014.11.11 |
| 申请号 | US201012888870 | 申请日期 | 2010.09.23 |
| 申请人 | Custom Sensors & Technologies, Inc. | 发明人 | Berger William Paul;Collins Mark Andrew;Frazee Michael Thomas;Smith Thad W. (Marc);Anderson Robert Albert;Knowles Stuart John;Dragotti Victor |
| 分类号 | G01R31/28;G01P1/02;B81B7/00;B81C1/00;G01C19/5628;H01L23/057;G01C19/5783 | 主分类号 | G01R31/28 |
| 代理机构 | Hamilton, Brook, Smith & Reynolds, P.C. | 代理人 | Hamilton, Brook, Smith & Reynolds, P.C. |
| 主权项 | 1. A method of fabricating an inertial sensor, the method comprising: bonding a plurality of layers of insulative material together to form a unitary body with first and second cavities opening through opposite sides of the body; mounting a sensing element in the first cavity; mounting electronic circuitry in the second cavity; electrically interconnecting the sensing element and the electronic circuitry; attaching external leads to the body for mounting the sensor and making connections with the circuitry; connecting test points in the second cavity to the sensing element and testing the sensing element via the test points. | ||
| 地址 | Moorpark CA US | ||