Method for improving repeatability in edge location results of a machine vision inspection system

摘要

A method for improving repeatability in edge location measurement results of a machine vision inspection system comprises: placing a workpiece in a field of view of the machine vision inspection system; providing an edge measurement video tool comprising an edge-referenced alignment compensation defining portion; operating the edge measurement video tool to define a region of interest of the video tool which includes an edge feature of the workpiece; operating the edge measurement video tool to automatically perform scan line direction alignment operations such that the scan line direction of the edge measurement video tool is aligned along a first direction relative to the edge feature, wherein the first direction is defined by predetermined alignment operations of the edge-referenced alignment compensation defining portion; and performing edge location measurement operations with the region of interest in that position.

主权项

1. A method for improving repeatability in edge location measurement results of a machine vision inspection system, the machine vision inspection system comprising:
an edge measurement video tool comprising a region of interest portion, wherein the edge measurement video tool is configured to detect edge points along a plurality of scan lines in the region of interest such that an edge location measurement may be determined based on the detected edge points; the method comprising:
placing a workpiece in a field of view of the machine vision inspection system;operating the edge measurement video tool to define a region of interest, including an edge feature, in an acquired image of the workpiece;operating the edge measurement video tool to automatically determine scan line data comprising an intensity profile along a plurality of scan lines across the edge feature in the region of interest; andanalyzing the plurality of scan lines in order to provide an edge-referenced alignment compensation related to a respective offset amount of the edge feature along respective scan lines of the analyzed plurality of scan lines, wherein the edge-referenced alignment compensation is usable to adjust the scan line data of the edge measurement video tool such that the respective offset amount of the edge feature along respective scan lines is at least one of (a) substantially removed, (b) substantially compensated, and (c) substantially matched to a previously determined respective offset amount of a corresponding edge feature along respective scan lines.