Mask frame assembly for thin film deposition

摘要

A mask frame assembly for depositing a deposition material on a deposition substrate comprises a mask frame including an opening and frames surrounding the opening, and a mask coupled on the mask frame. A deformation prevention unit is formed on at least one region of the mask. Since the deformation prevention unit is formed on a peripheral portion of a deposition pattern in the mask, deformation of the mask in a vertical direction may be reduced. Accordingly, defective attaching of the mask to the substrate may be reduced.

主权项

1. A mask frame assembly for a thin film deposition, the mask frame assembly comprising:
a mask frame including an opening and frames surrounding the opening; and a mask extending from a first end to a second end in a first direction, the first and second ends coupled to the frames, the mask comprising:
a plurality of deposition patterns separated from each other and arranged in the first direction; anda plurality of ribs interposed between immediately adjacent deposition patterns and connecting the deposition patterns to each other, each rib including a plurality of first dummy deposition patterns arranged in a second direction that is perpendicular to the first direction, a width of each first dummy deposition pattern determined in the second direction being less than a width of said each first dummy deposition pattern determined in the first direction, and the width of said each first dummy deposition pattern determined in the first direction being less than a distance between two immediately adjacent ribs determined in the first direction.