Piezoelectric actuator and a method of manufacturing the same

摘要

A piezoelectric actuator including first and second piezoelectric cantilevers is disclosed. Wirings are provided on an upper surface of a support body on which the first and second piezoelectric cantilevers are formed. The wirings are formed of patterned metal films.

主权项

1. A piezoelectric actuator comprising:
a support member including a frame body and a support body which is thinner than the frame body and has an end portion integrated with the frame body, the support body including plural first, second and third support parts, wherein the first support parts correspond to areas for forming first piezoelectric cantilevers, the second support parts correspond to areas for forming second piezoelectric cantilevers and are separated from the first support parts, and the third support parts couple the first support parts and the second support parts; first piezoelectric cantilevers each including a first piezoelectric body between a pair of a first electrode and a second electrode; second piezoelectric cantilevers each including a second piezoelectric body between a pair of a third electrode and a fourth electrode; first wirings provided on an upper surface of the support body for electrically coupling the first electrodes and the third electrodes; a second wiring provided on the upper surface of the support body, the second wiring being electrically coupled to the second electrodes provided on the first support parts, and extending in the same direction as the second piezoelectric cantilevers; and a third wiring provided on the upper surface of the support body, the third wiring being electrically coupled to the fourth electrodes provided on the second support parts, and extending in the same direction as the first piezoelectric cantilevers; wherein the second and third wirings are formed of metal films.