Integrated mechanical device for electrical switching

摘要

An integrated circuit comprising a mechanical device for electrical switching comprising a first assembly being thermally deformable and having a beam held at at least two different locations by at least two arms, the beam and the arms being metal and disposed within the same metallization level, and further comprising at least one electrically conducting body. The first assembly has a first configuration at a first temperature and a second configuration at a second temperature different from the first temperature. The beam is out of contact with the electrically conducting body in one configuration in contact with the body in the other configuration. The beam establishes or breaks an electrical link passing through the said at least one electrically conducting body and through the said beam in the different configurations.

主权项

1. A device, comprising:
a beam disposed in an enclosure, the beam having at least a first conductive portion; at least two arms disposed in the enclosure and attached to surfaces of the enclosure, wherein the at least two arms are thermally deformable and contact the beam at different locations; wherein the enclosure is disposed within a metallization level between dielectric layers; and wherein the at least two arms are configured to, at a first temperature, cause the beam to connect an electrical circuit from the beam through the first conductive portion, and, at a second temperature, cause the beam to disconnect the electrical circuit.