| 发明名称 | Charged particle optical system and scribing apparatus | ||
| 摘要 | An optical system for a charged particle includes a first member though which a charged particle beam is transmitted and a second member to control optically the charged particle beam transmitted through the first member. The second member has a fixing portion fixed to the first member. A slit is arranged between a part of the second member and the fixing portion to separate the part of the second member from the fixing portion, such that the part of the second member is a cantilever beam structure pivotal in relation to the fixing portion. | ||
| 申请公布号 | US8884246(B2) | 申请公布日期 | 2014.11.11 |
| 申请号 | US201213667337 | 申请日期 | 2012.11.02 |
| 申请人 | Canon Kabushiki Kaisha | 发明人 | Kato Takahisa |
| 分类号 | H01J37/147;H01J29/74;H01J37/317;H01J37/04 | 主分类号 | H01J37/147 |
| 代理机构 | Fitzpatrick, Cella, Harper & Scinto | 代理人 | Fitzpatrick, Cella, Harper & Scinto |
| 主权项 | 1. An optical system for a charged particle, the optical system comprising: a first member through which a charged particle beam is transmitted; and a second member configured to control optically the charged particle beam transmitted through the first member, wherein the second member has a fixing portion fixed to the first member, and a slit arranged between a part of the second member and the fixing portion to separate the part of the second member from the fixing portion, wherein the slit is configured such that the part of the second member is a cantilever beam structure pivotal in relation to the fixing portion. | ||
| 地址 | Tokyo JP | ||