Method for processing process-target object

摘要

Provided is a method including the steps of: carrying out a storage process by causing a processing jig, which has a supply opening for supplying a first processing liquid, to be positioned such that a storage space section into which the supply opening is open is sandwiched by the processing jig and the process-target surface, and by storing the first processing liquid in the storage space section; and carrying out a rotation process by supplying the first processing liquid onto the process-target surface from the supply opening, while supplying a second processing liquid onto the outer peripheral part, in a state where the process-target object is being rotated, in the step for carrying out the rotation process, the processing jig being moved along a direction which is not a direction along which the process-target object is being rotated.

主权项

1. A method for processing a process-target object, the process-target object having a process-target surface and an outer peripheral part which is provided along an outer periphery of the process-target surface,
said method comprising the steps of: carrying out a storage process by causing a processing jig, which has a supply opening for supplying a first processing liquid, to be positioned such that a space into which the supply opening is open is sandwiched by the processing jig and the process-target surface, and by storing the first processing liquid in said space; and carrying out a rotation process by supplying the first processing liquid onto the process-target surface from the supply opening, while supplying a second processing liquid onto the outer peripheral part, in a state where the process-target object is being rotated, wherein: in the step for carrying out the rotation process, the processing jig is moved along a direction which is not a direction along which the process-target object is being rotated; in the step for carrying out the storage process, a region of the process-target surface which region is in contact with said space is smaller than the entire process-target surface; and in the step for carrying out the storage process, the processing jig is moved along a direction which is in parallel with the process-target surface.