发明名称 METHODS FOR FORMING RESISTIVE SWITCHING MEMORY ELEMENTS
摘要 <p>Resistive switching memory elements are provided that may contain electroless metal electrodes and metal oxides formed from electroless metal. The resistive switching memory elements may exhibit bistability and may be used in high-density multi-layer memory integrated circuits. Electroless conductive materials such as nickel-based materials may be selectively deposited on a conductor on a silicon wafer or other suitable substrate. The electroless conductive materials can be oxidized to form a metal oxide for a resistive switching memory element. Multiple layers of conductive materials can be deposited each of which has a different oxidation rate. The differential oxidization rates of the conductive layers can be exploited to ensure that metal oxide layers of desired thicknesses are formed during fabrication.</p>
申请公布号 KR101460823(B1) 申请公布日期 2014.11.11
申请号 KR20097018476 申请日期 2008.01.25
申请人 发明人
分类号 H01L21/8247;H01L27/115 主分类号 H01L21/8247
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