发明名称 SEPARATABLE CONTACTOR FOR PROBE CARD
摘要 <p>The present invention relates to a contactor for a probe card. A separable contactor for a probe card according to the present invention comprises: bumps in a matrix arrangement which are formed on one surface of a wafer in contact with a wafer pad to be tested; first connection pads which are electrically connected to the bumps, respectively, and arranged in one row outside the bumps; and second connection pads which have a pitch greater than that of each of the pads constituting the first connection pads, and are arranged in one row outside the first connection pads.</p>
申请公布号 KR20140129524(A) 申请公布日期 2014.11.07
申请号 KR20130047906 申请日期 2013.04.30
申请人 NANO LIGUID DEVICES KOREA CO., LTD.;OKINS ELECTRONICS CO., LTD. 发明人 PARK, YOUNG SOH;JUN, JIN GUK
分类号 H01L21/66;G01R1/073 主分类号 H01L21/66
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