发明名称 |
SEPARATABLE CONTACTOR FOR PROBE CARD |
摘要 |
<p>The present invention relates to a contactor for a probe card. A separable contactor for a probe card according to the present invention comprises: bumps in a matrix arrangement which are formed on one surface of a wafer in contact with a wafer pad to be tested; first connection pads which are electrically connected to the bumps, respectively, and arranged in one row outside the bumps; and second connection pads which have a pitch greater than that of each of the pads constituting the first connection pads, and are arranged in one row outside the first connection pads.</p> |
申请公布号 |
KR20140129524(A) |
申请公布日期 |
2014.11.07 |
申请号 |
KR20130047906 |
申请日期 |
2013.04.30 |
申请人 |
NANO LIGUID DEVICES KOREA CO., LTD.;OKINS ELECTRONICS CO., LTD. |
发明人 |
PARK, YOUNG SOH;JUN, JIN GUK |
分类号 |
H01L21/66;G01R1/073 |
主分类号 |
H01L21/66 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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