SUBSTRATE TRANSFER APPARATUS, SUBSTRATE TRANSFER METHOD, AND RECORDING MEDIUM HAVING RECORDED PROGRAM FOR EXECUTING THE SUBSTRATE TRANSFER METHOD

摘要

An object of the present invention is to provide a substrate transfer apparatus which can maintain a substrate having a bent texture in a circumferential portion by a fork and can precisely detect the amount of misaligned substrate positions when transferring the substrate, thereby easily compensating the misaligned substrate positions, checking the state of the fork, and compensating the fork at the same time. The substrate transfer apparatus includes a base; a maintenance unit (3A) installed from the base to be movable back and forth and maintaining a substrate (W); four or more detection units (5) detecting a position of a circumferential portion of the substrate maintained by the maintenance unit (3A) from different positions when the maintenance unit (3A) is moved back while maintaining the substrate (W); and a control unit determining whether one of the detection units (5) has detected a portion (WN) of the circumferential portion of the substrate where a bent texture is formed based on the circumferential portion position values detected by the detection units (5), and if one of the detection units (5) is determined to have the portion (WN) detected, compensating a substrate (W) transfer position of a processing unit when transferring the substrate to the next processing unit based on the values detected by the rest of the three detection units (5).