| 摘要 |
According to an embodiment, a charge particle beam drawing device includes a format testing part conducting a format test on drawing data having a layer structure based on test content, an information generating part generating test information about the format test and encoding information about the drawing data when the drawing data passes the test by the format testing part, an information memorizing part memorizing the encoding information and the test information, a code testing part testing the drawing data by using the encoding information in the information memorizing part when the format test is re-conducted on the stated drawing data based on the test content, an information testing part testing the test information in the information memorizing part, skipping the format test when the drawing data passes the test by the code testing part, and a test executing part conducting a test by changing processing content of the format test according to the test result. |
