发明名称 FINFET DEVICE WITH AN ETCH STOP LAYER POSITIONED BETWEEN A GATE STRUCTURE AND A LOCAL ISOLATION MATERIAL
摘要 One illustrative method disclosed herein includes forming a sacrificial gate structure above a fin, wherein the sacrificial gate structure is comprised of a sacrificial gate insulation layer, a layer of insulating material, a sacrificial gate electrode layer and a gate cap layer, forming a sidewall spacer adjacent opposite sides of the sacrificial gate structure, removing the sacrificial gate structure to thereby define a gate cavity that exposes a portion of the fin, and forming a replacement gate structure in the gate cavity. One illustrative device disclosed herein includes a plurality of fin structures that are separated by a trench formed in a substrate, a local isolation material positioned within the trench, a gate structure positioned around portions of the fin structures and above the local isolation material and an etch stop layer positioned between the gate structure and the local isolation material within the trench.
申请公布号 US2014327090(A1) 申请公布日期 2014.11.06
申请号 US201414334269 申请日期 2014.07.17
申请人 GLOBALFOUNDRIES Inc. 发明人 Cai Xiuyu;Xie Ruilong
分类号 H01L29/06;H01L29/78 主分类号 H01L29/06
代理机构 代理人
主权项
地址 Grand Cayman KY
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