| 发明名称 |
ROBUST MONOLITHIC MICROMECHANICAL VALVES FOR HIGH DENSITY MICROFLUIDIC VERY LARGE SCALE INTEGRATION |
| 摘要 |
A fabrication method of a micromechanical valve includes: (1) forming a control layer according to a first weight ratio of cross linker: elastomer base; (2) forming a flow layer according to a second weight ratio of cross linker: elastomer base; (3) forming a membrane layer according to a third weight ratio of cross linker: elastomer base, where the third weight ratio is smaller than the first weight ratio, and is smaller than the second weight ratio; (4) bonding the membrane layer to the control layer to form a two-layer structure; and (5) bonding the two-layer structure to the flow layer to form the micromechanical valve. |
| 申请公布号 |
US2014326400(A1) |
申请公布日期 |
2014.11.06 |
| 申请号 |
US201414266381 |
申请日期 |
2014.04.30 |
| 申请人 |
Araci Ismail Emre;Quake Stephen;Robles Michael;Bechstein Daniel |
发明人 |
Araci Ismail Emre;Quake Stephen;Robles Michael;Bechstein Daniel |
| 分类号 |
F16K99/00;B32B37/24 |
主分类号 |
F16K99/00 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
1. A fabrication method of a micromechanical valve, comprising:
forming a control layer according to a first weight ratio of cross linker:elastomer base; forming a flow layer according to a second weight ratio of cross linker:elastomer base; forming a membrane layer according to a third weight ratio of cross linker:elastomer base, wherein the third weight ratio is smaller than the first weight ratio, and is smaller than the second weight ratio; bonding the membrane layer to the control layer to form a two-layer structure; and bonding the two-layer structure to the flow layer to form the micromechanical valve. |
| 地址 |
Redwood City CA US |
