发明名称 |
MICROWAVE HEAT-TREATMENT DEVICE AND TREATMENT METHOD |
摘要 |
<p>A microwave heating apparatus includes a processing chamber for accommodating a target, a support device for supporting the target in the processing chamber and a microwave introducing device for generating microwaves to introduce them into the processing chamber. The processing chamber further includes a top wall having a plurality of microwave introduction ports to introduce the microwaves generated in the microwave introducing device into the processing chamber. Each of the microwave introduction ports has a rectangular shape having long sides and short sides parallel to inner wall surfaces of four sidewalls of the processing chamber, and the support device includes a support member to support the target and a rotating mechanism for rotating the supported target.</p> |
申请公布号 |
KR20140129301(A) |
申请公布日期 |
2014.11.06 |
申请号 |
KR20147026992 |
申请日期 |
2013.02.05 |
申请人 |
TOKYO ELECTRON LIMITED |
发明人 |
TANAKA SUMI;IKEDA TARO;KABE YOSHIRO;SHIMOMURA KOUJI;HONG, SEOK HYOUNG;YAMASHITA JUN;BAN MASAKAZU;MONDEN TAICHI;MAENISHI MASAYOSHI;YAMAZAKI RYOJI |
分类号 |
H05B6/74;H01L21/268;H05B6/72 |
主分类号 |
H05B6/74 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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