| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a measurement device capable of grasping intensity (irradiance) of light radiated onto a specimen and adjusting the intensity (irradiance) as set.SOLUTION: A measurement device includes: holding means 3 that has a mount surface on which a specimen S being an observation object is mounted; illumination means that emits illumination light to be radiated onto the mount surface; detection means 60 that detects intensity of the illumination light on the mount surface; a field diaphragm 90 that is provided on an optical path of the illumination means, through which the illumination light passes, in which an opening 90a is formed through which an image of the illumination light is projected onto the mount surface, and that narrows a field in the mount surface by the image of the opening; and a calculation unit 42 that calculates intensity of the illumination light per unit area on the mount surface on the basis of an area of the opening of the field diaphragm and the intensity of the illumination light detected by the detection means.</p> |
