CHARGE PUMP CAPACITOR ASSEMBLY WITH SILICON ETCHING

摘要

A charge pump capacitor assembly (190) includes a charge pump capacitor (190) and a silicon substrate (198). The charge pump capacitor includes: a silicon-based charge pump capacitor dielectic layer (205), a first terminal (201) on a first side and a second terminal (203) on a second side of the silicon-based charge pump capacitor dielectric layer opposite the first side, and a field oxide layer (207) adjacent the second terminal. The charge pump capacitor is coupled to the silicon substrate. The silicon substrate is etched to reduce contact between the silicon substrate and the field oxide layer under the capacitor.