发明名称 METHOD AND APPARATUS FOR TREATING FLUIDS TO REDUCE MICROBUBBLES
摘要 <p>PROBLEM TO BE SOLVED: To provide an apparatus including a novel exchange device.SOLUTION: Versions of the invention include methods for reducing microbubbles in liquids treated by heat or mass exchange devices. The exchange devices may be conditioned by having gases in crevices and surfaces displaced by a liquid. The methods can be used to prepare liquids with reduced numbers of microbubbles. Approaches in embodiments of the invention for reducing microbubbles in fluids include minimizing nucleation sites for bubbles, such as crevices of a housing.</p>
申请公布号 JP2014208341(A) 申请公布日期 2014.11.06
申请号 JP20140079976 申请日期 2014.04.09
申请人 ENTEGRIS INC 发明人 JOSEPH ZAHKA;WU AIWEN
分类号 B01D19/00;B01F1/00;H01L21/027;H01L21/304 主分类号 B01D19/00
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