摘要 |
An optical component comprises a mirror array having a multiplicity of mirror elements, which are each connected to at least one actuator for displacement, a multiplicity of signal lines for the signal-transmitting connection of the actuators to an external, global control/regulating device for predefining an absolute position of the individual mirror elements, and a multiplicity of local regulating devices for regulating the positioning of the mirror elements, wherein the regulating devices are in each case completely integrated into the component. |