发明名称 OPTICAL COMPONENT
摘要 An optical component comprises a mirror array having a multiplicity of mirror elements, which are each connected to at least one actuator for displacement, a multiplicity of signal lines for the signal-transmitting connection of the actuators to an external, global control/regulating device for predefining an absolute position of the individual mirror elements, and a multiplicity of local regulating devices for regulating the positioning of the mirror elements, wherein the regulating devices are in each case completely integrated into the component.
申请公布号 US2014327896(A1) 申请公布日期 2014.11.06
申请号 US201414334281 申请日期 2014.07.17
申请人 Carl Zeiss SMT GmbH 发明人 Waldis Severin;Orth Matthias;Bostock Roger Marc;Deng Jian;Lani Sebastian;Knauf Benedikt;Kempter Christian
分类号 G03F7/20 主分类号 G03F7/20
代理机构 代理人
主权项
地址 Oberkochen DE