| 摘要 |
PROBLEM TO BE SOLVED: To provide a light irradiation device in which the distance between the light emission surface of a light transmission window and the surface of a workpiece can be fixed substantially, and the workpiece can be processed uniformly.SOLUTION: A light irradiation device is constituted to include an ultraviolet light emission lamp for emitting vacuum ultraviolet light to a workpiece arranged under an oxygen atmosphere, and a light transmission window arranged between the workpiece and the ultraviolet light emission lamp and transmitting the vacuum ultraviolet light from the ultraviolet light emission lamp. The light transmission window is arranged in a state pressed against the workpiece via a spacer for pressing the workpiece, and the light irradiation device is constituted so that a gap having a constant distance is formed between the surface of the light transmission window on the light emission side and the surface of the workpiece. |
