STAGE DEVICE, DRAWING DEVICE AND METHOD FOR MANUFACTURING ARTICLE

摘要

PROBLEM TO BE SOLVED: To provide a stage device which reduces magnetic leakage.SOLUTION: A stage device includes: a stage; a linear motor which drives the stage; a magnetic shield unit which surrounds the linear motor so that a magnetic field generated by a magnet of the linear motor is shielded; and a demagnetizing coil which is arranged in a space surrounded by the magnetic shield unit and demagnetizes the magnetic shield unit.