发明名称 MICROMECHANICAL COMPONENT AND METHOD FOR PRODUCING A MICROMECHANCAL COMPONENT HAVING A THIN-LAYER CAP
摘要 A micromechanical component having a substrate, a micromechanical functional layer situated above the substrate, and an encapsulation layer situated above the functional layer, and a method for producing the micromechanical component are provided, the encapsulation layer having at least one trench, and a bridging of the trench by at least one electrically insulating connection link is provided.
申请公布号 US2014327154(A1) 申请公布日期 2014.11.06
申请号 US201414332751 申请日期 2014.07.16
申请人 SCHMITZ Volker;GROSSE Axel 发明人 SCHMITZ Volker;GROSSE Axel
分类号 B81B7/00 主分类号 B81B7/00
代理机构 代理人
主权项
地址 Pfullingen DE