发明名称 |
MINIATURE MEMS ACTUATOR ASSEMBLIES |
摘要 |
In one embodiment, an electrostatic actuator includes a generally planar fixed frame, a generally planar moving frame coupled to the fixed frame by a flexure for substantially coplanar, perpendicular movement relative to the fixed frame, a plurality of interdigitated teeth, a fixed portion of which is attached to the fixed frame and a moving portion of which is attached to the moving frame, and an elongated output shaft having opposite input and output ends, the input end being coupled to the moving frame. |
申请公布号 |
WO2014144863(A3) |
申请公布日期 |
2014.11.06 |
申请号 |
WO2014US29452 |
申请日期 |
2014.03.14 |
申请人 |
DIGITALOPTICS CORPORATION MEMS |
发明人 |
CALVET, ROBERT, J.;WANG, GUIQIN;GUTIERREZ, ROMAN, C.;LIU, XIAOLEI |
分类号 |
G02B7/08;B81B3/00;G02B27/64;G03B3/10;H02N1/00 |
主分类号 |
G02B7/08 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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