| 发明名称 |
APPARATUS AND METHOD FOR PLASMA TREATMENT OF SURFACES |
| 摘要 |
A method and a device for the plasma treatment of surfaces of at least one workpiece. At least one plasma source is connected to an energy source in order to generate a plasma. A closed area is in fluid connection to the at least one plasma source. At least one suction unit is used to adjust a pressure difference between the at least one plasma source and the closed area. |
| 申请公布号 |
US2014326277(A1) |
申请公布日期 |
2014.11.06 |
| 申请号 |
US201414333217 |
申请日期 |
2014.07.16 |
| 申请人 |
Maschinenfabrik Reinhausen GmbH |
发明人 |
Nettesheim Stefan;Forster Klaus;Korzec Dariusz |
| 分类号 |
H01J37/32;B08B7/00 |
主分类号 |
H01J37/32 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
1. An apparatus for the plasma treatment of surfaces of at least one workpiece, comprising:
a closed space; at least one plasma source connected with a power supply for the generation of a plasma; a single opening of the closed space provides fluid communication with a respective plasma distribution element which is located within the closed space; at least one extraction for setting a pressure difference between the at least one plasma source and the closed space; and a plurality of plasma discharge openings each plasma distribution element exhibits. |
| 地址 |
Regensburg DE |
