发明名称 |
Thermal Type Flowmeter |
摘要 |
Provided is a thermal type flowmeter in which contamination of a sensor element is reduced. The flowmeter includes a sensor element including a heating resistor formed in a thin film part, the thin film part being provided on a diaphragm formed on a substrate; a support member to locate the sensor element thereon; a secondary channel that includes part of the support member and takes in part of intake air flowing through an air intake pipeline; and a guide member provided on the support member or the sensor element that lies on a line L that extends along an air flow in the secondary channel and passing over the thin film part, the guide member allowing fine particles to be guided in a direction away from the line L, the fine particles coming together with an air flow along the surface of the support member or the sensor element. |
申请公布号 |
US2014326064(A1) |
申请公布日期 |
2014.11.06 |
申请号 |
US201214359161 |
申请日期 |
2012.01.18 |
申请人 |
Nakano Hiroshi;Matsumoto Masahiro;Asano Satoshi;Hanzawa Keiji |
发明人 |
Nakano Hiroshi;Matsumoto Masahiro;Asano Satoshi;Hanzawa Keiji |
分类号 |
G01F1/692 |
主分类号 |
G01F1/692 |
代理机构 |
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代理人 |
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主权项 |
1. A thermal type flowmeter comprising:
a sensor element including a heating resistor formed in a thin film part, the thin film part being provided on a diaphragm formed on a substrate; a support member to locate the sensor element thereon; and a secondary channel which includes part of the support member and takes in part of intake air flowing through an air intake pipeline, wherein the thermal type flowmeter comprises a guide member provided on the support member or the sensor element that lies on a line L, the line L extending along an air flow in the secondary channel and passing over the thin film part, the guide member allowing fine particles to be guided in a direction away from the line L, the fine particles coming together with an air flow along the surface of the support member or the sensor element. |
地址 |
Tokyo JP |