发明名称 Thermal Type Flowmeter
摘要 Provided is a thermal type flowmeter in which contamination of a sensor element is reduced. The flowmeter includes a sensor element including a heating resistor formed in a thin film part, the thin film part being provided on a diaphragm formed on a substrate; a support member to locate the sensor element thereon; a secondary channel that includes part of the support member and takes in part of intake air flowing through an air intake pipeline; and a guide member provided on the support member or the sensor element that lies on a line L that extends along an air flow in the secondary channel and passing over the thin film part, the guide member allowing fine particles to be guided in a direction away from the line L, the fine particles coming together with an air flow along the surface of the support member or the sensor element.
申请公布号 US2014326064(A1) 申请公布日期 2014.11.06
申请号 US201214359161 申请日期 2012.01.18
申请人 Nakano Hiroshi;Matsumoto Masahiro;Asano Satoshi;Hanzawa Keiji 发明人 Nakano Hiroshi;Matsumoto Masahiro;Asano Satoshi;Hanzawa Keiji
分类号 G01F1/692 主分类号 G01F1/692
代理机构 代理人
主权项 1. A thermal type flowmeter comprising: a sensor element including a heating resistor formed in a thin film part, the thin film part being provided on a diaphragm formed on a substrate; a support member to locate the sensor element thereon; and a secondary channel which includes part of the support member and takes in part of intake air flowing through an air intake pipeline, wherein the thermal type flowmeter comprises a guide member provided on the support member or the sensor element that lies on a line L, the line L extending along an air flow in the secondary channel and passing over the thin film part, the guide member allowing fine particles to be guided in a direction away from the line L, the fine particles coming together with an air flow along the surface of the support member or the sensor element.
地址 Tokyo JP