摘要 |
<p>PROBLEM TO BE SOLVED: To provide a method for patterning a magnetic thin film on a substrate.SOLUTION: The method includes: providing a pattern about the magnetic thin film, with selective regions of the pattern permitting penetration of energized ions of one or more elements. Energized ions are generated with sufficient energy to penetrate the selective regions and a portion of the magnetic thin film adjacent to the selective regions. The substrate is placed to receive the energized ions. The portion of the magnetic thin film is subjected to thermal excitation. The portion of the magnetic thin film exhibits a magnetic property different from selected other portions.</p> |