| 发明名称 |
Permanent Magnet Based High Performance Multi-Axis Immersion Electron Lens Array with Low Axial Leakage Field |
| 摘要 |
An apparatus includes a magnetic adjustment lens positioned at the electron beam path between the electron source and sample, the magnetic adjustment lens excited by an electric coil, and a permanent magnet lens positioned below the magnetic adjustment lens to focus the electron beam onto the sample surface, the permanent magnet lens excited by one or more permanent ring magnets enclosed except on a bottom surface by a magnetic field conductor. The magnetic adjustment lens may be excited to eliminate magnetic field leakage of the permanent magnet lens. |
| 申请公布号 |
US2014326895(A1) |
申请公布日期 |
2014.11.06 |
| 申请号 |
US201414196190 |
申请日期 |
2014.03.04 |
| 申请人 |
Tao Luo |
发明人 |
Luo Tao |
| 分类号 |
H01J37/14;H01J3/20 |
主分类号 |
H01J37/14 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
1. An apparatus, comprising:
a magnetic adjustment lens, which is excited by an electric coil, positioned along an electron beam path between an electron source and a sample to be scanned by the electron beam; and a permanent magnet lens positioned below the magnetic adjustment lens to focus the electron beam onto the sample, the permanent magnet lens excited by one or more permanent ring magnets enclosed except on a bottom surface by a magnetic field conductor. |
| 地址 |
Edgefield Plains SG |
